 |
This machine is specially designed for conformal
coating using CVD (Chemical Vapor Deposition) process. The machine consists of four portions, which are Evaporation-Disintegration Room, Deposition Chamber, Chiller Unit, and Vacuum Pump. The actual coating process is done under the decompression environment, and thecoating flow would be as follows. 1, diX Dimer (Powder) is vaporized in Vaporizer. (Evaporation-Disintegration Room) 2, diX would be pyrolyzed in Pyrolizer under the temperature of 650℃～700℃, turns to be the radical monomer. (Evaporation-Disintegration Room) 3, The radical monomer is pulled into the Deposition Chamber. (Deposition Chamber) 4, As the radical monomer of diX touches with the surface of the object, it forms high molecule polyparaxylilene layer. (Deposition Chamber) |
 |
|
| １．Full automation | All of the coating process can be done automatically by built
in pressure and temperature controlling system. |
| ２．Alternation from crystal tube |
Pyrolizer is made by special material, eliminated the need
of crystal tube. The special material has high anti-corrosion performance than the crystal tube. |
| ３．Simple components |
Both horizontal (DACS-0050H/0025H) and vertical (DACS-0600V)
deposition chambers are designed to connect to each portion. This system will help to reduce the cost of purchasing another machine. |
 |
||
| ① Main Unit Power Supply：200V 3phase 50A(Max 38-43A) Size：1,500(W)×695(D)×1,000(H) ● Control Panel and Indicator (Automatic Temp.Control：5 step、Temp.Program：10 pattern) ● Vaporizer size：100A×300mm Vaporizer Temp is feedback control by chamber value ● Pyrolizer size：50A×1,110mm Accessories：tray、pirani gauge(chamber and pump)、 wheels and fix unit、pirani gauge heater ② Chiller Unit Type：KINETICS THERMAL SYSTEMS VT890A Power Supply：Power come from main unit Ability：- 80～ - 90℃ Accessories：trap set、intake and out tube |
③ Vacuum Pump |
|
 |
 |
 |
Torr